Deposition of superconducting Y-Ba-Cu-O films at 400 °C without post-annealing
- 18 July 1988
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (3), 234-236
- https://doi.org/10.1063/1.100585
Abstract
Superconducting thin films of Y1Ba2Cu3O7−x were fabricated using the process of plasma-assisted laser deposition. The substrate temperature was as low as 400 °C and high-temperature post-annealing in an O2 atmosphere was not necessary. The as-deposited films have a Tc of ∼85 K, and are oriented mostly with the c axis perpendicular to the substrate surface. The measured Jc at 80 K was 105 A/cm2.Keywords
This publication has 10 references indexed in Scilit:
- Growth of highly oriented CdS thin films by laser-evaporation depositionApplied Physics Letters, 1988
- I n s i t u preparation of Y-Ba-Cu-O superconducting thin films by magnetron sputteringApplied Physics Letters, 1988
- Superconducting thin films of Y-Ba-Cu-O produced by neodymium:yttrium aluminum garnet laser ablationApplied Physics Letters, 1988
- Magnetron sputtering and laser patterning of high transition temperature Cu oxide filmsApplied Physics Letters, 1987
- Formation of thin superconducting films by the laser processing methodApplied Physics Letters, 1987
- Production of YBa2Cu3O7−y superconducting thin films i n s i t u by high-pressure reactive evaporation and rapid thermal annealingApplied Physics Letters, 1987
- Nonconformal Al via filling and planarization by partially ionized beam deposition for multilevel interconnectionIEEE Electron Device Letters, 1987
- Critical current densities and transport in superconducting YBa2Cu3O7−δ films made by electron beam coevaporationApplied Physics Letters, 1987
- Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T c bulk materialApplied Physics Letters, 1987
- Spin-forbidden radiative decay of the a 4Πu state of O+2The Journal of Chemical Physics, 1987