Influence of substrate bias on the composition, structure and electrical properties of reactively d.c.-sputtered TiN films
- 1 November 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 97 (1), 69-77
- https://doi.org/10.1016/0040-6090(82)90418-7
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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