Thickness and quality of spin-coated polymer films by two-angle ellipsometry
- 22 June 1999
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 347 (1-2), 167-177
- https://doi.org/10.1016/s0040-6090(98)01619-8
Abstract
No abstract availableKeywords
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