Characterization of amorphous silicon films by Rutherford backscattering spectrometry
- 15 January 1980
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 168 (1-3), 211-215
- https://doi.org/10.1016/0029-554x(80)91255-0
Abstract
No abstract availableKeywords
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