Laser-induced diffusion by irradiation of silicon dipped into an organic solution of the dopant
- 1 May 1981
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 38 (9), 715-717
- https://doi.org/10.1063/1.92490
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Electrical and structural characteristics of laser-induced epitaxial layers in siliconApplied Physics Letters, 1979
- p-n junction formation in boron-deposited silicon by laser-induced diffusionApplied Physics Letters, 1978
- Properties of laser-assisted doping in siliconApplied Physics Letters, 1978
- Resistivity of Bulk Silicon and of Diffused Layers in SiliconBell System Technical Journal, 1962
- Solid Solubilities of Impurity Elements in Germanium and Silicon*Bell System Technical Journal, 1960