Stoichiometry and friction properties of sputtered MoSx layers
- 1 July 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 129 (1-2), 79-91
- https://doi.org/10.1016/0040-6090(85)90097-5
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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