The influence of iron and hydrogen in the nitridation of silicon
- 1 May 1979
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 14 (5), 1265-1268
- https://doi.org/10.1007/bf00561317
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- The effects of hydrogen on the nitridation of siliconJournal of Materials Science, 1979
- The combined effects of Fe and H2 on the kinetics of silicon nitridationJournal of Materials Science, 1978
- A mechanism for the nitridation of Fe-contaminated siliconJournal of Materials Science, 1978
- Nitridation of High‐Purity SiliconJournal of the American Ceramic Society, 1976
- Effect of H2‐N2 Nitriding Atmospheres on the Properties of Reaction‐Sintered Si3N4Journal of the American Ceramic Society, 1975
- STRUCTURAL ASPECTS OF SILICON NITRIDEPowder Metallurgy, 1961
- Kinetics of the Oxidation and Nitridation of Silicon at High TemperaturesThe Journal of Physical Chemistry, 1958