Determination of the fluorine concentration in silicon films grown from the disproportionation of SiF2
- 1 April 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 90 (2), 161-165
- https://doi.org/10.1016/0040-6090(82)90636-8
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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