CMOS foundry-based micromachining
- 1 March 1996
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 6 (1), 122-127
- https://doi.org/10.1088/0960-1317/6/1/030
Abstract
This paper reports on the first results of a study of the possibilities of the fabrication of micromechanical structures for microsystems applications in a regular MPC run of a standard CMOS process, followed by post-processing. Two post-processing modules, i.e., the frontside bulk etching module and the surface micromachining module are investigated. Examples of the former are suspended spiral coils for high-frequency applications and of the latter, metal bridge resonators.Keywords
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