Transient annealing of arsenic-implanted silicon using a graphite strip heater
- 1 July 1981
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 39 (1), 93-95
- https://doi.org/10.1063/1.92529
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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