Electrical characterisation of ion-implanted silicon-on-sapphire
- 31 December 1983
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 14 (6), 22-32
- https://doi.org/10.1016/s0026-2692(83)80081-0
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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