Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation
- 1 January 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 8 (3), 243-250
- https://doi.org/10.1109/84.788627
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
- A micromachined vibrating gyroscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A micromachined comb-drive tuning fork rate gyroscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A silicon micromachined vibrating gyroscope with piezoresistive detection and electromagnetic excitationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A new silicon rate gyroscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A bulk micromachined silicon angular rate sensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Commercial vision of silicon based inertial sensorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Advanced deep reactive ion etching: a versatile tool for microelectromechanical systemsJournal of Micromechanics and Microengineering, 1998
- A new fabrication method for borosilicate glass capillary tubes with lateral inlets and outletsSensors and Actuators A: Physical, 1997
- A silicon micromachined tuning fork gyroscopePublished by Institution of Engineering and Technology (IET) ,1996
- Application of deep reactive ion etching for silicon angular rate sensorMicrosystem Technologies, 1995