The surface chemistry of the thermal cracking of silane on silicon (111)
- 1 October 1984
- journal article
- Published by Elsevier in Surface Science
- Vol. 145 (2-3), 390-406
- https://doi.org/10.1016/0039-6028(84)90090-6
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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