ELS study on the initial stage of Ti-silicide formation on Si(1 1 1) at room temperature
- 29 February 1984
- journal article
- Published by Elsevier in Solid State Communications
- Vol. 49 (5), 459-462
- https://doi.org/10.1016/0038-1098(84)90663-x
Abstract
No abstract availableKeywords
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