High field current induced-positive charge transients in SiO2
- 1 October 1983
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 54 (10), 5793-5800
- https://doi.org/10.1063/1.331805
Abstract
The formation of bulk positive charge in SiO2 induced by charge injection and high field conditions is studied in this work, utilizing new experimental methods. Using a dc hot electron injection technique it is shown that the presence of electrons in the SiO2 conduction band is a necessary condition for the positive charge formation. This result rules out field (only) induced mechanisms as possible explanations of high field positive charge generation in SiO2. The positive charge formation and annihilation are found to be governed by the same rate equation, and, therefore, exhibit similar behavior as a function of time. This behavior is consistent with an impact ionization‐recombination model, with a recombination cross section σ=2×10−16 cm2 and ionization rate α which is in agreement with previous published values. However, other collision activated mechanisms cannot be ruled out.Keywords
This publication has 34 references indexed in Scilit:
- Breakdown in silicon oxide−A reviewJournal of Vacuum Science and Technology, 1977
- Impact ionization and positive charge in thin SiO2 filmsJournal of Applied Physics, 1976
- Electron trapping by radiation-induced charge in MOS devicesJournal of Applied Physics, 1976
- Dielectric instability and breakdown in SiO2 thin filmsJournal of Vacuum Science and Technology, 1976
- Impact ionization in silicon dioxide at fields in the breakdown rangeSolid State Communications, 1975
- Hole mobility and transport in thin SiO2 filmsApplied Physics Letters, 1975
- Low−temperature irradiation effects in SiO2−insulated MIS devicesJournal of Applied Physics, 1975
- Effects of ionizing radiation on thin-oxide (20–1500 Å) MOS capacitorsJournal of Applied Physics, 1974
- Dielectric Breakdown in Silicon Dioxide Films on SiliconJournal of the Electrochemical Society, 1972
- Effects of ionizing radiation on oxidized silicon surfaces and planar devicesProceedings of the IEEE, 1967