Energy dependence of the molecular effect in sputtering
- 1 January 1980
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 50 (1), 3-7
- https://doi.org/10.1080/01422447908226495
Abstract
We report measurements of sputtering yields of Au for Xe+ and Xe+ 2 impact in the energy range 1–50 keV. It was found that non-linear effects exist well outside the range predicted in a recent thermal spike model.Keywords
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