Study of density in pulsed-laser deposited amorphous carbon films using x-ray reflectivity
- 15 August 1994
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 65 (7), 830-832
- https://doi.org/10.1063/1.112245
Abstract
We report the accurate determination of the absolute density of the pulsed‐laser deposited amorphous carbon ultrathin films as well as the film density evolution with the substrate temperatures Ts (22–300 °C) using high‐resolution x‐ray reflectivity. The density values ρ for the films deposited with laser power density of 8×108 W/cm2 varied from 3.10 to 2.40 g/cm3 as the substrate temperature increased from 22 to 300 °C. This result, together with the optical band‐gap values obtained by transmittance measurements, clearly indicates a diamond‐like to graphite‐like microstructure change near Ts=200 °C.Keywords
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