The system for depositing hard diamond-like films onto complex-shaped machine elements in an r.f. arc plasma
- 31 August 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 47 (1-3), 106-112
- https://doi.org/10.1016/0257-8972(91)90273-y
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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