Fundamental understanding and modeling of reactive sputtering processes
Top Cited Papers
- 1 April 2005
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 476 (2), 215-230
- https://doi.org/10.1016/j.tsf.2004.10.051
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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