Recent aspects concerning DC reactive magnetron sputtering of thin films: a review
Top Cited Papers
- 1 May 2000
- journal article
- review article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 127 (2-3), 203-218
- https://doi.org/10.1016/s0257-8972(00)00566-1
Abstract
No abstract availableKeywords
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