Fabrication of 80 Å metal wires
- 1 March 1984
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 55 (3), 410-412
- https://doi.org/10.1063/1.1137752
Abstract
Some years ago Possin reported the fabrication of wires as small as 400 Å in diameter with a method involving electroplating into etched particle tracks in mica. We have refined this technique, and can now use it to routinely produce wires as small as 80 Å. These refinements are described, and the possibility of making even smaller wires with this method is discussed.Keywords
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