Which PZT thin films for piezoelectric microactuator applications?

Abstract

The effective piezoelectric coefficient e₃₁ has been measured on sol-gel processed Pb(Zr_xTi_1−x)O₃ thin films with Zr concentrations ranging from 45 to 60%. The largest value was observed at 45% Zr, although dielectric constant and effective d₃₃ peak at 53% Zr. The findings suggest that the optimal composition for microactuators and sensors is less than 45% Zr, i.e., in the tetragonal part of the phase diagram.