A micromachined piezoresistive angular rate sensor with a composite beam structure
- 16 February 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 72 (3), 217-223
- https://doi.org/10.1016/s0924-4247(98)00220-9
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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