Chemical vapor deposition of the superconducting YBa2Cu3O7−x phase using halides as metal sources
- 12 June 1989
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (24), 2476-2478
- https://doi.org/10.1063/1.101540
Abstract
It is shown for the first time that the superconducting YBa2Cu3O7−x phase can be deposited by chemical vapor deposition using the halide precursors YCl3, BaI2, and CuCl as metal sources and an O2/H2O gas mixture. Sintered calcium stabilized zirconia plates were used as substrates. The superconductor was obtained upon deposition without the need for post‐annealing. An ideal (001) texture was always found to prevail.Keywords
This publication has 5 references indexed in Scilit:
- Y1Ba2Cu3O7-δ Film Formation by an OM-CVD MethodJapanese Journal of Applied Physics, 1988
- Preparation of the High-Tc Phase of Bi-Sr-Ca-Cu-O SuperconductorJapanese Journal of Applied Physics, 1988
- Superconducting Y-Ba-Cu-O Oxide Films by OMCVDJapanese Journal of Applied Physics, 1988
- Preparation of YBa2Cu3O7−x Films by Chemical Vapor DepositionChemistry Letters, 1988
- Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressurePhysical Review Letters, 1987