Photo-CVD of ferroelectric Pb(Zr,Ti)O/sub 3/ thin films
- 2 January 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 336-339
- https://doi.org/10.1109/isaf.1992.300701
Abstract
Pb(Zr,Ti)O/sub 3/ thin films were grown by the photo-CVD (chemical vapor deposition) method using Pb(C/sub 2/H/sub 5/)/sub 4/, Zr(O-t-C/sub 4/H/sub 9/)/sub 4/, Ti(O-i-C/sub 3/H/sub 7/)/sub 4/, and O/sub 2/. In this growth system, both tetragonal Pb(Zr,Ti)O/sub 3/ films and rhombohedral Pb(Zr,Ti)O/sub 3/ films were obtained, and theKeywords
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