The effect of thermal annealing on the properties of alumina films prepared by metal organic chemical vapour deposition at atmospheric pressure
- 30 June 1994
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 64 (3), 183-193
- https://doi.org/10.1016/0257-8972(94)90106-6
Abstract
No abstract availableKeywords
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