Evaluation of some mechanical properties of SiC films deposited on steel by plasma-assisted chemical vapour deposition from tetramethylsilane
- 1 November 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 48 (2), 121-129
- https://doi.org/10.1016/0257-8972(91)90135-j
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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