General aspects of barrier layers for very-large-scale integration applications I: Concepts
- 1 October 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 96 (4), 301-316
- https://doi.org/10.1016/0040-6090(82)90514-4
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
- Chemical potential for diffusion in a stressed solidScripta Metallurgica, 1981
- Driving forces for mass transport in solidsScripta Metallurgica, 1981
- Chemical potentials in solidsScripta Metallurgica, 1980
- Diffusion processes in thin filmsThin Solid Films, 1980
- Bipolar transistor design for optimized power-delay logic circuitsIEEE Journal of Solid-State Circuits, 1979
- Diffusion barriers in thin filmsThin Solid Films, 1978
- Special aspects of diffusion in thin filmsThin Solid Films, 1975
- Design of ion-implanted MOSFET's with very small physical dimensionsIEEE Journal of Solid-State Circuits, 1974
- Electromigration in Thin FilmsPublished by Elsevier ,1973
- Selective X-Ray Diffraction from Artificially Stratified Metal Films Deposited by EvaporationPhysical Review B, 1935