Electric and fluid field analysis of side-drive micromotors
- 1 January 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 1 (3), 130-140
- https://doi.org/10.1109/84.186392
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- IC-processed micro-motors: design, technology, and testingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Operational characteristics of microfabricated electric motorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Analytical modelling of electrostatic structuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Electric micromotor dynamicsIEEE Transactions on Electron Devices, 1992
- Principles in design and microfabrication of variable-capacitance side-drive motorsJournal of Vacuum Science & Technology A, 1990
- A LOCOS process for an electrostatic microfabricated motorSensors and Actuators A: Physical, 1990
- In situ friction and wear measurements in integrated polysilicon mechanismsSensors and Actuators A: Physical, 1990
- Friction and wear in microfabricated harmonic side-drive motorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990