On the modulation of electron energy distribution function in radiofrequency SiH4, SiH4?H2 bulk plasmas
- 1 December 1988
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 8 (4), 399-424
- https://doi.org/10.1007/bf01016057
Abstract
No abstract availableKeywords
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