Preparation of large-area monocrystalline silicon thin windows
- 1 September 1980
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 51 (9), 1212-1216
- https://doi.org/10.1063/1.1136404
Abstract
A procedure suitable for laboratory practice is described to prepare large‐area self‐supporting silicon thin crystals with (100), (110) and (111) orientations. Windows up to 2 cm in diameter and 2000 Å in thickness can be produced. Variation in the thickness across the sample can be as low as ±60 Å as measured by 4He+ backscattering spectrometry.Keywords
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