Surface micromachined pressure sensors with integrated CMOS read-out electronics
- 1 May 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 43 (1-3), 157-163
- https://doi.org/10.1016/0924-4247(94)80002-2
Abstract
No abstract availableKeywords
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