An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations
- 19 November 2003
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 109 (1-2), 156-164
- https://doi.org/10.1016/j.sna.2003.09.037
Abstract
No abstract availableKeywords
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