Chemical and structural analysis of a-SiGe:H by sims and XPS investigations
- 1 December 1989
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 114, 474-476
- https://doi.org/10.1016/0022-3093(89)90621-2
Abstract
No abstract availableKeywords
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- Microstructure of plasma-deposited a-Si : H filmsApplied Physics Letters, 1979
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