Properties and coating rates of diamond-like carbon films produced by R.F. glow discharge of hydrocarbon gases
- 15 October 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 63 (1), 155-160
- https://doi.org/10.1016/0040-6090(79)90117-2
Abstract
No abstract availableKeywords
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- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971