Simultaneous Chemical Vapor Deposition of Boron Nitride and Aluminum Nitride
- 1 October 1991
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 74 (10), 2649-2658
- https://doi.org/10.1111/j.1151-2916.1991.tb06814.x
Abstract
No abstract availableKeywords
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