Micromachined vibration sensor with on-chip circuitry and optical interconnects
- 15 June 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 68 (1-3), 249-256
- https://doi.org/10.1016/s0924-4247(98)00013-2
Abstract
No abstract availableKeywords
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