Codeposition on hot CVD surfaces: Particle dynamics and deposit roughness interactions
- 17 June 1996
- journal article
- Published by Wiley in AIChE Journal
- Vol. 42 (6), 1673-1684
- https://doi.org/10.1002/aic.690420619
Abstract
No abstract availableKeywords
This publication has 25 references indexed in Scilit:
- SINTERING KINETICS AND TRANSPORT PROPERTY EVOLUTION OF LARGE MULTI-PARTICLE AGGREGATESChemical Engineering Communications, 1996
- Deposition of silicon carbide using the chemical vapor composites process: Process characterization and comparison with RASSPVDN model predictionsJournal of Materials Research, 1993
- Thermophoretic Effects on Particles in Counterflow Laminar Diffusion FlamesCombustion Science and Technology, 1993
- Size- and Structure-lnsensitivity of the Thermophoretic Transport of Aggregated “Soot” Particles in GasesCombustion Science and Technology, 1991
- Model of particle‐vapor codeposition with application to ceramic materials synthesisAIChE Journal, 1991
- Chemical Boundary Layers in CVD: I . Irreversible ReactionsJournal of the Electrochemical Society, 1990
- Particle generation in a chemical vapor deposition process with seed particlesAIChE Journal, 1990
- Superconducting powders generated by an aerosol processMaterials Letters, 1989
- PREPARATION OF AMORPHOUS TiO2 FILMS BY THERMOPHORESIS-AIDED CHEMICAL VAPOR DEPOSITIONChemistry Letters, 1986
- Rapid Growth of AlN Films by Particle-Precipitation Aided Chemical Vapor DepositionJapanese Journal of Applied Physics, 1985