Fabrication and characterization of silicon micromachined threshold accelerometers
- 31 December 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 29 (3), 235-240
- https://doi.org/10.1016/0924-4247(91)80020-p
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applicationsSensors and Actuators, 1987
- Solid-state capacitive pressure transducersSensors and Actuators, 1986
- An integrated capacitive pressure sensor with frequency-modulated outputSensors and Actuators, 1986
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- A batch-fabricated silicon accelerometerIEEE Transactions on Electron Devices, 1979
- Microminiature ganged threshold accelerometers compatible with integrated circuit technologyIEEE Transactions on Electron Devices, 1972
- Field Assisted Glass-Metal SealingJournal of Applied Physics, 1969
- A Water-Amine-Complexing Agent System for Etching SiliconJournal of the Electrochemical Society, 1967