Micromechanical resonators for oscillators and filters
- 19 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1 (10510117), 489-499
- https://doi.org/10.1109/ultsym.1995.495626
Abstract
Fully monolithic, high-Q, micromechanical signal processors are described. A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is detailed, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator to achieve high stability. The operation and performance of mechanical resonators are modelled, with emphasis on circuit and noise modelling. Micromechanical filter design is described, and a prototype two-resonator bandpass filter is demonstrated. An integrated micro-oven that stabilizes the resonance frequency against temperature variations using only 2 mW of power is reviewed. Brownian motion and mass loading phenomena are shown to have a greater influence on short-term stability and dynamic range in this micro-scale. Scaling strategies are proposed to alleviate potential limitations due to Brownian noise.Keywords
This publication has 17 references indexed in Scilit:
- Polysilicon resonant microbeam technology for high performance sensor applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitryPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- CMOS micromechanical resonator oscillatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Frequency control requirements of radarPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Design and performance of CMOS micromechanical resonator oscillatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Viscous damping model for laterally oscillating microstructuresJournal of Microelectromechanical Systems, 1994
- The effect of thermoelastic internal friction on the Q of micromachined silicon resonatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989
- Air and gas damping of quartz tuning forksSensors and Actuators, 1983
- Crystal Oscillator Design and Temperature CompensationPublished by Springer Nature ,1978