Carrier Density Profiles in Zn- and Cd-Diffused InP

Abstract
This letter reports on studies of Zn and Cd diffusion in (100) n-InP single crystals, carried out using Zn3P2 and Cd3P2 sources. When n-InP background carrier density N D is lower than 1016 cm-3, two diffusion fronts are observed and a p+-n--n junction is formed for Zn and Cd diffusion. A p+-n one-sided abrupt junction is formed when N D is 1016–1017 cm-3. The carrier density profiles were observed through EBIC measurement, van der Pauw method, C-V measurement using a Schottky barrier contact, and diffusion velocity dependence on n-InP background carrier density.