VLSI Technology and Dielectric Film Science
- 1 October 1986
- journal article
- Published by AIP Publishing in Physics Today
- Vol. 39 (10), 47-54
- https://doi.org/10.1063/1.881068
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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- Probing the transition layer at the SiO2-Si interface using core level photoemissionApplied Physics Letters, 1984
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