Scanning transmission electron microscopy: microanalysis for the microelectronic age
- 1 January 1981
- journal article
- Published by IOP Publishing in Journal of Physics F: Metal Physics
- Vol. 11 (1), 1-26
- https://doi.org/10.1088/0305-4608/11/1/007
Abstract
In this critical review, a brief account is presented of the new techniques of 'analytical electron microscopy': that is to say, the chemical and structural analysis of very small amounts of matter. Image formation, diffraction analysis, electron energy loss spectroscopy, and X-ray analysis are all discussed. The discussion is sufficiently detailed to allow the reader to appreciate what can be done with the techniques but it is intended to be easily understood by the non-specialist.Keywords
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