On-Wafer S-Parameter and Waveform Measurements
- 1 November 1990
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 18, 128-138
- https://doi.org/10.1109/arftg.1990.324004
Abstract
Rapid and accurate on-wafer measurements are essential to the affordable manufacture of large volumes of monolithic microwave integrated circuits (MMICs). The purposes of this paper are to compare published on-wafer scattering (S) parameter and waveform measurement methods, identify those that are most useful for particular applications, and discuss probable future directions. Methods discussed include all-electronic measurements with coplanar waveguide (CPW) and magnetic proximity probes as well as combination electronic and optical techniques using picosecond pulsed lasers.Keywords
This publication has 10 references indexed in Scilit:
- 100 GHz on-wafer S-parameter measurements by electrooptic samplingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- External electro-optic probing of millimeter-wave integrated circuitsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A non-contacting probe for measurements on high-frequency planar circuitsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A time-domain network analyzer which uses optoelectronic techniquesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Subpicosecond sampling using a noncontact electro-optic probeJournal of Applied Physics, 1989
- Millimeter-wave monolithic integrated circuit characterization by a picosecond optoelectronic techniqueIEEE Transactions on Microwave Theory and Techniques, 1989
- Waveform measurements in high-speed silicon bipolar circuits using a picosecond photoelectron scanning electron microscopeIEEE Transactions on Electron Devices, 1988
- Picosecond optical sampling of GaAs integrated circuitsIEEE Journal of Quantum Electronics, 1988
- Subpicosecond electrooptic sampling: Principles and applicationsIEEE Journal of Quantum Electronics, 1986
- On-Wafer Measurement of Gigahertz Integrated CircuitsPublished by Elsevier ,1985