Extreme-ultraviolet polarization and filtering with gold transmission gratings

Abstract

The polarization and transmission characteristics of freestanding gold transmission gratings, with 200-nm periods, for extreme-ultraviolet (EUV) radiation (l < 200 nm) have been measured. We find that EUV transmission through the gratings is dominated by the waveguide characteristics of the gratings and that polarization efficiencies of 90% for wavelengths of 121.6 nm are achievable. Both the EUV polarization and transmission properties are in good agreement with a complete vector, numerical solution of Maxwell’s equations. The fraction of open area to total area of the grating has been measured using a 10-keV proton beam and was found to be in good agreement with the microscopic slit and wire dimensions that were obtained by scanning electron microscopy. The use of these gratings for particle measurements in the presence of intense EUV radiation is briefly discussed.