Rutherford back-scattering and ellipsometry of selenium implanted InP
- 14 October 1981
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 14 (10), 1915-1922
- https://doi.org/10.1088/0022-3727/14/10/024
Abstract
Good correlation has been found between disorder, measured by Rutherford back-scattering and the extinction coefficient obtained from ellipsometry measurements for 200 keV selenium ions implanted up to a dose of 1*1015 cm-2 at room temperature. Both techniques show that InP becomes amorphous for doses greater than 5*1018 Se+ cm-2. The magnitude of the reflectivity, refractive index and extinction coefficient, obtained from ellipsometry, are presented as a function of dose.Keywords
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