Fully integrated cmos resonant cantilever sensor for bio-chemical detection in liquid environments
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 640-643
- https://doi.org/10.1109/sensor.2005.1496498
Abstract
We present a novel design of a fully integrated resonant cantilever sensor for biochemical detection in liquid environments. Four mass-sensitive, resonant cantilevers are monolithically integrated with a fully differential feedback circuit, a digital counter, and a digital I/sup 2/C interface. The entire system is fabricated in an industrial 0.8-/spl mu/m CMOS (complementary metal oxide semiconductor) process combined with subsequent micromachining. The cantilever with electromagnetic actuation and piezoresistive readout is the frequency-determining element in the feedback system. Detection of protein absorption on the cantilever has been shown with this system.Keywords
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