Improved atomic force microscope using a laser diode interferometer
- 1 August 1992
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (8), 3905-3908
- https://doi.org/10.1063/1.1143289
Abstract
The performance of an atomic force microscope using a laser diode interferometer has been improved to the point where its resolution is comparable to that of laser beam deflection systems. We describe the structure of this microscope, present a model that takes into account the main parameters associated with its operation, and demonstrate its sensitivity by showing images of a small area scan with atomic resolution as well as a large area scan in a stand‐alone configuration.Keywords
This publication has 11 references indexed in Scilit:
- Magnetic force microscopy: General principles and application to longitudinal recording mediaJournal of Applied Physics, 1990
- Performance of a scanning force microscope using a laser diodeJournal of Vacuum Science & Technology A, 1990
- A differential interferometer for force microscopyReview of Scientific Instruments, 1989
- Forces in atomic force microscopy in air and waterApplied Physics Letters, 1989
- Theory of the laser diode interaction in scanning force microscopyIEEE Journal of Quantum Electronics, 1989
- Compact scanning-force microscope using a laser diodeOptics Letters, 1988
- Scanning Tunneling Microscopy and Atomic Force Microscopy: Application to Biology and TechnologyScience, 1988
- Novel optical approach to atomic force microscopyApplied Physics Letters, 1988
- High-resolution capacitance measurement and potentiometry by force microscopyApplied Physics Letters, 1988
- Atomic Force MicroscopePhysical Review Letters, 1986