Non-hydride group V sources for OMVPE
- 1 July 1988
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 17 (4), 327-335
- https://doi.org/10.1007/bf02652114
Abstract
No abstract availableKeywords
This publication has 53 references indexed in Scilit:
- Mass spectrometric studies of phosphine pyrolysis and OMVPE growth of InPJournal of Crystal Growth, 1987
- Reactions in OMVPE Growth of InPMRS Proceedings, 1987
- Metalorganic chemical-vapour-deposition growth and characterization of GaAsCanadian Journal of Physics, 1985
- Mechanism of MOCVD Growth for GaAs and AlAsJapanese Journal of Applied Physics, 1984
- Correlation between Surface Morphology and Electrical Properties of GaAs Grown by Metalorganic Chemical Vapor DepositionJapanese Journal of Applied Physics, 1984
- Metal organic vapour phase epitaxy of indium phosphideJournal of Crystal Growth, 1983
- OMVPE growth of AlxGa1−xAsJournal of Crystal Growth, 1981
- High purity GaAs prepared from trimethylgallium and arsineJournal of Crystal Growth, 1981
- InAsSbP-InAs Superlattice Grown by Organometallic VPE MethodJapanese Journal of Applied Physics, 1980
- Mass Spectrometric Studies of Vapor Phase Crystal GrowthJournal of the Electrochemical Society, 1971