Heteroepitaxial growth of 3C–SiC using HMDS by atmospheric CVD
- 1 July 1999
- journal article
- Published by Elsevier in Materials Science and Engineering B
- Vol. 61-62, 579-582
- https://doi.org/10.1016/s0921-5107(98)00478-4
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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